Construction of the masjid started in 1609. The royal architect Sedefhar Mehmat Aga, was appointed by the Sultan as in-charge of the project. The opening ceremony was held in 1616. Unfortunately, the Sultan could not see the completion of the masjid in his life. It was completed in the reign of his successor Mustafa I.
The upper level of the interior is adorned with blue paint. More than 200 stained glass windows with intricate designs allow natural light to brighten up its interior and the chandeliers further illuminate it with their glow. The decorations include A'yat from the Holy Quran. The floors are covered with carpets.
The royal room is situated at the south east corner. It has its own pulpit that used to be decorated with jade and roses.